Integrated circuit metrology, inspection, and process control V : 4-5 March 1991, San Jose, California

著者

• Arnold, William H.
• Society of Photo-optical Instrumentation Engineers

書誌事項

Integrated circuit metrology, inspection, and process control V : 4-5 March 1991, San Jose, California

William H. Arnold, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 1464）

SPIE, c1991

注記

Includes bibliographical references and index

• NII書誌ID(NCID): BA26090024
• ISBN:
  • 0819405639
• LCCN: 91061053
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash., USA
• ページ数/冊数: x, 630 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7874
  • DC20 : 621.381/5
• 件名:
  • LCSH : Integrated circuits -- Inspection -- Congresses
  • LCSH : Integrated circuits -- Measurement -- Congresses
• 親書誌ID:
  • BA0022700X