Integrated circuit metrology, inspection, and process control V : 4-5 March 1991, San Jose, California

Author(s)

• Arnold, William H.
• Society of Photo-optical Instrumentation Engineers

Bibliographic Information

Integrated circuit metrology, inspection, and process control V : 4-5 March 1991, San Jose, California

William H. Arnold, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 1464）

SPIE, c1991

Note

Includes bibliographical references and index

Details

• NCID: BA26090024
• ISBN:
  • 0819405639
• LCCN: 91061053
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash., USA
• Pages/Volumes: x, 630 p.
• Size: 28 cm
• Classification:
  • LCC : TK7874
  • DC20 : 621.381/5
• Subject Headings:
  • LCSH : Integrated circuits -- Inspection -- Congresses
  • LCSH : Integrated circuits -- Measurement -- Congresses
• Parent Bibliography ID:
  • BA0022700X