Advances in resist technology and processing VIII : 4-5 March 1991, San Jose, California

Author(s)

• Ito, Hiroshi
• Society of Photo-optical Instrumentation Engineers

Bibliographic Information

Advances in resist technology and processing VIII : 4-5 March 1991, San Jose, California

Hiroshi Ito, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 1466）

SPIE, c1991

Note

Includes bibliographical references and index

Details

• NCID: BA26091876
• ISBN:
  • 0819405655
• LCCN: 91061057
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash., USA
• Pages/Volumes: xii, 679 p.
• Size: 28 cm
• Parent Bibliography ID:
  • BA0022700X