Gettering and deffect engineering in semiconductor technology : GADEST '95 : proceedings of the 6th International Autumn Meeting, held in Parkhotel Schloß Wulkow, near Berlin, Germany, September 02-07, 1995

Author(s)

• International Autumn Meeting, Gettering and Defect Engineering in Semiconductor Technology
• Richter, Hans
• Kittler, Martin
• Claeys, Cor

Bibliographic Information

Gettering and deffect engineering in semiconductor technology : GADEST '95 : proceedings of the 6th International Autumn Meeting, held in Parkhotel Schloß Wulkow, near Berlin, Germany, September 02-07, 1995

editors, H. Richter, M. Kittler and C. Claeys

（Diffusion and defect data : solid state data, Pt. B . Solid state phenomena ; v. 47-48）

SciTec Publications, 1995

Note

Includes bibliographical references and index

Details

• NCID: BA26129913
• ISBN:
  • 390845011X
• Country Code: sz
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Untermuhleweg, Switzerland
• Pages/Volumes: xv, 621 p.
• Size: 25 cm
• Parent Bibliography ID:
  • BA07841800