Gettering and deffect engineering in semiconductor technology : GADEST '95 : proceedings of the 6th International Autumn Meeting, held in Parkhotel Schloß Wulkow, near Berlin, Germany, September 02-07, 1995

著者

• International Autumn Meeting, Gettering and Defect Engineering in Semiconductor Technology
• Richter, Hans
• Kittler, Martin
• Claeys, Cor

書誌事項

Gettering and deffect engineering in semiconductor technology : GADEST '95 : proceedings of the 6th International Autumn Meeting, held in Parkhotel Schloß Wulkow, near Berlin, Germany, September 02-07, 1995

editors, H. Richter, M. Kittler and C. Claeys

（Diffusion and defect data : solid state data, Pt. B . Solid state phenomena ; v. 47-48）

SciTec Publications, 1995

注記

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BA26129913
• ISBN:
  • 390845011X
• 出版国コード: sz
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Untermuhleweg, Switzerland
• ページ数/冊数: xv, 621 p.
• 大きさ: 25 cm
• 親書誌ID:
  • BA07841800