10th Annual Symposium on Microlithography : proceedings : September 26-27, 1990, Sunnyvale Hilton, Sunnyvale, California

著者

• Symposium on Microlithography
• Bacus International
• Society of Photo-optical Instrumentation Engineers

書誌事項

10th Annual Symposium on Microlithography : proceedings : September 26-27, 1990, Sunnyvale Hilton, Sunnyvale, California

sponsored by Bacus International

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 1496）

SPIE, c1991

注記

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BA26148598
• ISBN:
  • 0819406058
• LCCN: 91060046
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash., USA
• ページ数/冊数: v, 315 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7871.85
  • DC20 : 621.381/52
• 件名:
  • LCSH : Semiconductors -- Congresses
  • LCSH : Microlithography -- Congresses
  • LCSH : Masks (Electronics) -- Congresses
• 親書誌ID:
  • BA0022700X