Multilayer optics for advanced x-ray applications : 22-23 July 1991, San Diego, California

Author(s)

• Ceglio, Natale M.
• Society of Photo-optical Instrumentation Engineers

Bibliographic Information

Multilayer optics for advanced x-ray applications : 22-23 July 1991, San Diego, California

Natale M. Ceglio, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 1547）

SPIE, c1992

Note

"Part of a five-conference program on X-Ray and EUV Technologies held at SPIE's 1991 International Symposium on Optical Applied Science and Engineering, 21-26 July 1991, in San Diego, California"--P. v

Includes bibliographical references and index

Details

• NCID: BA26222089
• ISBN:
  • 0819406759
• LCCN: 91062692
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.
• Pages/Volumes: vii, 242 p.
• Size: 28 cm
• Classification:
  • LCC : TA1775
• Subject Headings:
  • LCSH : X-ray optics -- Congresses
  • LCSH : Thin films, Multilayered -- Congresses
  • LCSH : X-ray lithography -- Congresses
• Parent Bibliography ID:
  • BA0022700X