Electrical characterization of silicon-on-insulator materials and devices

著者

• Cristoloveanu, Sorin
• Li, Sheng S.

書誌事項

Electrical characterization of silicon-on-insulator materials and devices

by Sorin Cristoloveanu and Sheng S. Li

（The Kluwer international series in engineering and computer science, SECS 305）

Kluwer Academic, c1995

注記

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BA26231294
• ISBN:
  • 0792395484
• LCCN: 94043971
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Boston
• ページ数/冊数: xiv, 381 p.
• 大きさ: 25 cm
• 分類:
  • LCC : TK7871.85
  • DC20 : 621.3815/2
• 件名:
  • LCSH : Semiconductors -- Design and construction
  • LCSH : Silicon-on-insulator technology
  • LCSH : Semiconductors -- Electric properties
• 親書誌ID:
  • BA0004729X