Film synthesis and growth using energetic beams : symposium held April 17-20, 1995, San Francisco, California, U.S.A.
著者
書誌事項
Film synthesis and growth using energetic beams : symposium held April 17-20, 1995, San Francisco, California, U.S.A.
（Materials Research Society symposium proceedings, v. 388）
Materials Research Society, c1995
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注記
Includes bibliographical references and index
内容説明・目次
内容説明
With over 16 countries represented, this book represents international developments in the field of film synthesis and growth using energetic beams. It focuses on pulsed-laser deposition. Fundamental issues pertaining to the generation of laser ablation plumes, temperature distributions and collisional effects are described. Ion-assisted pulsed-laser deposition, pulsed-ion deposition, applications of hyperthermal beams and aspects of surface dynamics are discussed. The inclusion of an ion beam with the ablation process leads to some unique modifications in the thin-film growth mechanisms, and hence, film properties. Likewise, the collision of high-mass metal cluster ions with substrates shows promise for growth of novel structures. Also featured are new developments of optoelectronic materials, nitrides and carbon films using a variety of techniques. The effects of beam-induced defects on growth and surface morphology, chemical effects during growth, and characterization of film growth and film properties are addressed.
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