Modeling and simulation of thin-film processing : symposium held April 17-20, 1995, San Francisco, California, U.S.A.

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Modeling and simulation of thin-film processing : symposium held April 17-20, 1995, San Francisco, California, U.S.A.

editors, David J. Srolovitz ... [et al.]

(Materials Research Society symposium proceedings, v. 389)

Materials Research Society, c1995

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Includes bibliographical references and index

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