Handbook of critical dimension metrology and process control : proceedings of a conference held 28-29 September 1993, Monterey, California
Author(s)
Bibliographic Information
Handbook of critical dimension metrology and process control : proceedings of a conference held 28-29 September 1993, Monterey, California
（Critical reviews of optical science and technology, v. CR52）
SPIE Optical Engineering Press, c1994
Available at 2 libraries
Note
Includes bibliographical references
Description and Table of Contents
Description
Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.
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