Introduction to microelectronic fabrication

著者

• Jaeger, Richard C.

書誌事項

Introduction to microelectronic fabrication

Richard C. Jaeger

（Modular series on solid state devices, v. 5）

Addison-Wesley Pub. Co., 1993, c1988

注記

"Reprinted with corrections May, 1993."--T.p. verso

Includes bibliographical references and index

• NII書誌ID(NCID): BA26303180
• ISBN:
  • 0201146959
• LCCN: 86022128
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Reading, Mass. ; Tokyo
• ページ数/冊数: xiii, 232 p.
• 大きさ: 24 cm
• 分類:
  • LCC : TK7874
  • DC19 : 621.381/73
  • NDC8 : 549.8
• 件名:
  • LCSH : Integrated circuits -- Very large scale integration -- Design and construction -- Congresses
• 親書誌ID:
  • BA00909134