Process module metrology, control, and clustering : 11-13 September 1991, San Jose, California

Author(s)

• Davis, Cecil J.
• Herman, Irving P.
• Turner, Terry R.
• Society of Photo-optical Instrumentation Engineers

Bibliographic Information

Process module metrology, control, and clustering : 11-13 September 1991, San Jose, California

Cecil J. Davis, Irving P. Herman, Terry R. Turner, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 1594）

SPIE, c1992

Note

"Part of a two-conference program on Microelectronic Manufacturing Science and Technology held at SPIE's 1991 Symposium on Microelectronic Processing Integration, 9-13 September 1991, in San Jose, California"--P. vii

Includes bibliographical references and index

Details

• NCID: BA26307002
• ISBN:
  • 0819407259
• LCCN: 91067547
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.
• Pages/Volumes: ix, 419 p.
• Size: 28 cm
• Classification:
  • LCC : TK7836
  • DC20 : 621.381
• Subject Headings:
  • LCSH : Microelectronics industry -- Production control -- Congresses
  • LCSH : Integrated circuits -- Design and construction -- Congresses
  • LCSH : Optical detectors -- Industrial applications -- Congresses
  • LCSH : Manufacturing processes -- Automation -- Congresses
• Parent Bibliography ID:
  • BA0022700X