Rapid thermal and integrated processing : 10-11 September 1991, San Jose, California
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Rapid thermal and integrated processing : 10-11 September 1991, San Jose, California
(Proceedings / SPIE -- the International Society for Optical Engineering, v. 1595)
SPIE, c1992
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"Part of a two-conference program on Rapid Thermal Processing and Metallization held at SPIE's 1991 Symposium on Microelectronic Processing Integration, 9-13 September 1991, in San Jose, California"--P. ix
Includes bibliographical references and index