Metallization : performance and reliability issues for VLSI and ULSI : 12-13 September 1991, San Jose, California

Author(s)

• Gildenblat, Gennady Sh.
• Schwartz, Gary P.
• Society of Photo-optical Instrumentation Engineers

Bibliographic Information

Metallization : performance and reliability issues for VLSI and ULSI : 12-13 September 1991, San Jose, California

Gennady S. Gildenblat, Gary P. Schwartz, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 1596）

SPIE, c1991

Note

"Part of a two-conference program on Rapid Thermal Processing and Metallization held at SPIE's 1991 Symposium on Microelectronic Processing Integration, 9-13 September 1991, in San Jose, California"--P. v

Includes bibliographical references and index

Details

• NCID: BA26308005
• ISBN:
  • 0819407275
• LCCN: 91067549
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.
• Pages/Volumes: vii, 159 p.
• Size: 28 cm
• Classification:
  • LCC : TK7874
• Subject Headings:
  • LCSH : Integrated circuits -- Very large scale integration -- Reliability -- Congresses
  • LCSH : Metallic films -- Congresses
  • LCSH : Vapor-plating -- Congresses
  • LCSH : Integrated circuits -- Very large scale integration -- Testing -- Congresses
• Parent Bibliography ID:
  • BA0022700X