Metallization : performance and reliability issues for VLSI and ULSI : 12-13 September 1991, San Jose, California

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書誌事項

Metallization : performance and reliability issues for VLSI and ULSI : 12-13 September 1991, San Jose, California

Gennady S. Gildenblat, Gary P. Schwartz, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 1596）

SPIE, c1991

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注記

"Part of a two-conference program on Rapid Thermal Processing and Metallization held at SPIE's 1991 Symposium on Microelectronic Processing Integration, 9-13 September 1991, in San Jose, California"--P. v

Includes bibliographical references and index

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  • Proceedings

    SPIE -- the International Society for Optical Engineering

    SPIE -- the International Society for Optical Engineering

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