Lasers in microelectronic manufacturing : 10-11 September 1991, San Jose, California

Author(s)

• Braren, Bodil
• Society of Photo-optical Instrumentation Engineers

Bibliographic Information

Lasers in microelectronic manufacturing : 10-11 September 1991, San Jose, California

Bodil Braren, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 1598）

SPIE, c1991

Note

Includes bibliographical references and index

Details

• NCID: BA26315576
• ISBN:
  • 0819407291
• LCCN: 91067489
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.
• Pages/Volumes: vii, 240 p.
• Size: 28 cm
• Classification:
  • LCC : TK7874
  • DC20 : 621.381
• Subject Headings:
  • LCSH : Microelectronics -- Congresses
  • LCSH : Lasers -- Industrial applications -- Congresses
• Parent Bibliography ID:
  • BA0022700X