Integrated circuit metrology, inspection, and process control VI : 9-11 March 1992, San Jose, California

Author(s)

• Postek, Michael T.
• Society of Photo-optical Instrumentation Engineers
• SPIE Conference on Integrated Circuit Metrology, Inspection, and Process Control

Bibliographic Information

Integrated circuit metrology, inspection, and process control VI : 9-11 March 1992, San Jose, California

Michael T. Postek, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 1673）

SPIE, c1992

Note

"Papers presented at the Sixth Annual SPIE Conference on Integrated Circuit Metrology, Inspection, and Process Control, which took place in San Jose, California, 9-12 March 1992"--Introd.

Includes bibliographical references and index

Details

• NCID: BA26385990
• ISBN:
  • 081940828X
• LCCN: 91061053
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash., USA
• Pages/Volumes: xi, 697 p.
• Size: 28 cm
• Classification:
  • LCC : TK7874
  • DC20 : 621.381/5
• Subject Headings:
  • LCSH : Integrated circuits -- Inspection -- Congresses
  • LCSH : Integrated circuits -- Measurement -- Congresses
• Parent Bibliography ID:
  • BA0022700X