Advanced semiconductor epitaxial growth processes and lateral and vertical fabrication : 23-26 March 1992, Somerset, New Jersey

著者

• Malik, R. J.
• Society of Photo-optical Instrumentation Engineers

書誌事項

Advanced semiconductor epitaxial growth processes and lateral and vertical fabrication : 23-26 March 1992, Somerset, New Jersey

Roger J. Malik ... [et al.], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 1676）

SPIE, c1992

注記

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BA26390028
• ISBN:
  • 0819408379
• LCCN: 92081133
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash.
• ページ数/冊数: ix, 238 p.
• 大きさ: 28 cm
• 分類:
  • LCC : QC611.8.C64
  • DC20 : 621.3815/2
• 件名:
  • LCSH : Compound semiconductors -- Congresses
  • LCSH : Epitaxy -- Congresses
  • LCSH : Crystal growth -- Congresses
• 親書誌ID:
  • BA0022700X