Simulation of semiconductor devices and processes, vol. 6
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書誌事項
Simulation of semiconductor devices and processes, vol. 6
Springer-Verlag, c1995
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注記
"Proceedings of the 6th International Conference on "Simulation of Semiconductor Devices and Processes" which was held at the Campus of the University of Erlangen-Nuremberg in Erlangen, September 6-8, 1995."
Includes bibliographical references and index
内容説明・目次
内容説明
SISDEP-95 provides an international forum for the presentation of state-of-the-art research and development results in the area of numerical process and device simulation. Continuously shrinking device dimensions, the use of new materials, and advanced processing steps in the manufacturing of semiconductor devices require new and improved software. The trend towards increasing complexity in structures and process technology demands advanced models describing all basic effects and sophisticated two and three dimensional tools for almost arbitrarily designed geometries. The book contains the latest results obtained by scientists from more than 20 countries on process simulation and modeling, simulation of process equipment, device modeling and simulation of novel devices, power semiconductors, and sensors, on device simulation and parameter extraction for circuit models, practical application of simulation, numerical methods, and software.
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