Rapid thermal and integrated processing IV : symposium held April 17-20, 1995, San Francisco, California, U.S.A.

Author(s)

• Brueck, S. R. J.

Bibliographic Information

Rapid thermal and integrated processing IV : symposium held April 17-20, 1995, San Francisco, California, U.S.A.

editors, Steven R. J. Brueck ... [et al.]

（Materials Research Society symposium proceedings, v. 387）

Materials Research Society, c1995

Other Title

Rapid thermal and integrated processing 4

Rapid thermal and integrated processing four

Note

Includes bibliographical references and indexes

Details

• NCID: BA26512125
• ISBN:
  • 1558992901
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Pittsburgh, PA
• Pages/Volumes: xiii, 454 p.
• Size: 24 cm
• Classification:
  • LCC : TK7871.85
  • DC20 : 621.3815/2
• Subject Headings:
  • LCSH : Semiconductors -- Heat treatment -- Congresses
  • LCSH : Semiconductor doping -- Congresses
  • LCSH : Chemical vapor deposition -- Congresses
  • LCSH : Dielectrics -- Congresses
• Parent Bibliography ID:
  • BA00013775