Microelectronics manufacturing and reliability : 21-22 September 1992, San Jose, California

Author(s)

• Vasquez, Barbara
• Society of Photo-optical Instrumentation Engineers

Bibliographic Information

Microelectronics manufacturing and reliability : 21-22 September 1992, San Jose, California

Barbara Vasquez ... [et al.], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 1802）

SPIE, c1993

Note

Includes bibliographical references and index

Details

• NCID: BA26603220
• ISBN:
  • 0819410004
• LCCN: 92062652
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.
• Pages/Volumes: x, 258 p.
• Size: 28 cm
• Classification:
  • LCC : TK7874
  • DC20 : 621.3815
• Subject Headings:
  • LCSH : Integrated circuits -- Design and construction -- Congresses
  • LCSH : Integrated circuits -- Testing -- Congresses
• Parent Bibliography ID:
  • BA0022700X