Advanced techniques for integrated circuit processing II : 21-23 September 1992, San Jose, California

Author(s)

• Bondur, James
• Society of Photo-optical Instrumentation Engineers

Bibliographic Information

Advanced techniques for integrated circuit processing II : 21-23 September 1992, San Jose, California

James Bondur ... [et al.], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 1803）

SPIE, c1993

Note

Includes bibliographical references and index

Details

• NCID: BA26603708
• ISBN:
  • 0819410012
• LCCN: 92062653
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash., USA
• Pages/Volumes: x, 404 p.
• Size: 28 cm
• Classification:
  • LCC : TK7874
  • DC20 : 621.381/5
• Subject Headings:
  • LCSH : Integrated circuits -- Design and construction -- Congresses
• Parent Bibliography ID:
  • BA0022700X