Rapid thermal and laser processing : 24-25 September 1992, San Jose, California

著者

• Kwong, Dim-Lee
• Müller, Heinrich G.
• Society of Photo-optical Instrumentation Engineers

書誌事項

Rapid thermal and laser processing : 24-25 September 1992, San Jose, California

Dim-Lee Kwong, Heinrich G. Müller, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 1804）

SPIE, c1993

注記

Includes bibliographical references and index

• NII書誌ID(NCID): BA26606499
• ISBN:
  • 0819410020
• LCCN: 92062655
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash., USA
• ページ数/冊数: vii, 167 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7871.85
  • DC20 : 621.3815/2
• 件名:
  • LCSH : Semiconductors -- Heat treatment -- Congresses
  • LCSH : Semiconductor doping -- Congresses
  • LCSH : Semiconductor industry -- Laser use in -- Congresses
  • LCSH : Plasma-enhanced chemical vapor deposition -- Congresses
  • LCSH : Multichip modules (Microelectronics) -- Design and construction -- Congresses
  • LCSH : Rapid thermal processing -- Congresses
• 親書誌ID:
  • BA0022700X