Radio-frequency capacitive discharges

Author(s)

• Raĭzer, I︠U︡. P. (I︠U︡riĭ Petrovich)
• Shneider, Mikhail N.
• Yatsenko, Nikolai A.

Bibliographic Information

Radio-frequency capacitive discharges

Yuri P. Raizer, Mikhail N. Shneider, Nikolai A. Yatsenko

CRC Press, c1995

Note

Translation from Russian

Includes bibliographical references (p. 271-289) and index

Details

• NCID: BA26633662
• ISBN:
  • 0849386446
• LCCN: 94048594
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Original Language Code: rus
• Place of Publication: Boca Raton ; Tokyo
• Pages/Volumes: xii, 292 p.
• Size: 24 cm
• Classification:
  • LCC : QC711.8.R35
  • DC20 : 537.5/34
  • DC20 : 537.53
• Subject Headings:
  • LCSH : Radio frequency discharges
  • LCSH : Electric discharges through gases
  • LCSH : Carbon dioxide lasers
  • LCSH : Plasma diagnostics
  • FREE : Gases