Industrial applications of optical inspection, metrology, and sensing : 19-20 November 1992, Boston, Massachusetts

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Industrial applications of optical inspection, metrology, and sensing : 19-20 November 1992, Boston, Massachusetts

Gordon M. Brown, Kevin G. Harding, H. Philip Stahl, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering

(Proceedings / SPIE -- the International Society for Optical Engineering, v. 1821)

SPIE, c1993

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Includes bibliographical references and index

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