Advances in resist technology and processing VII : 5-6 March, 1990, San Jose, California

Author(s)

• Watts, Michael P. C.
• Society of Photo-optical Instrumentation Engineers

Bibliographic Information

Advances in resist technology and processing VII : 5-6 March, 1990, San Jose, California

Michael P. C. Watts Chair/editor ; sponsored by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 1262）

International Society for Optical Engineering, c1990

Note

Includes bibliographical references and index

• NCID: BA26792462
• ISBN:
  • 0819403091
• LCCN: 90060892
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash., USA
• Pages/Volumes: viii, 595 p.
• Size: 28 cm
• Parent Bibliography ID:
  • BA0022700X