Advances in resist technology and processing VII : 5-6 March, 1990, San Jose, California

著者

• Watts, Michael P. C.
• Society of Photo-optical Instrumentation Engineers

書誌事項

Advances in resist technology and processing VII : 5-6 March, 1990, San Jose, California

Michael P. C. Watts Chair/editor ; sponsored by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 1262）

International Society for Optical Engineering, c1990

注記

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BA26792462
• ISBN:
  • 0819403091
• LCCN: 90060892
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash., USA
• ページ数/冊数: viii, 595 p.
• 大きさ: 28 cm
• 親書誌ID:
  • BA0022700X