Theory and application of laser chemical vapor deposition
著者
書誌事項
Theory and application of laser chemical vapor deposition
（Lasers, photonics, and electro-optics）
Plenum Press, c1995
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注記
Includes bibliographical references and index
内容説明・目次
内容説明
In this monograph, the authors offer a comprehensive examination of the latest research on Laser Chemical Vapor Deposition (LCVD). Chapters explore the physics of LCVD as well as the principles of a wide range of related phenomena-including laser-matter interactions, heat transfer, fluid flow, chemical kinetics, and adsorption. With this reference, researchers will discover how to apply these principles to developing theories about various types of LCVD processes; gain greater insight into the basic mechanisms of LCVD; and obtain the ability to design and control an LCVD system.
目次
Introduction. Pyrolytic LCVD. Photolytic LCVD. Pyrolytic LCVD Modeling. Photolytic LCVD Modeling. Appendix A: Definitions of Energy Density, Irradiance, and Intensity. Appendix B: Thermal Stress Analysis. Appendix C: Volumetric Absorption Rate. Appendix D: Physical Constants and Conversion Factor. Index.
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