Advances in resist technology and processing X : 1-2 March 1993, San Jose, California

著者

• Hinsberg, William D.
• Society of Photo-optical Instrumentation Engineers

書誌事項

Advances in resist technology and processing X : 1-2 March 1993, San Jose, California

William D. Hinsberg, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 1925）

SPIE, c1993

注記

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BA27104237
• ISBN:
  • 0819408271
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash., USA
• ページ数/冊数: xi, 738 p.
• 大きさ: 28 cm
• 親書誌ID:
  • BA0022700X