Advances in resist technology and processing X : 1-2 March 1993, San Jose, California

Author(s)

• Hinsberg, William D.
• Society of Photo-optical Instrumentation Engineers

Bibliographic Information

Advances in resist technology and processing X : 1-2 March 1993, San Jose, California

William D. Hinsberg, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 1925）

SPIE, c1993

Note

Includes bibliographical references and index

• NCID: BA27104237
• ISBN:
  • 0819408271
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash., USA
• Pages/Volumes: xi, 738 p.
• Size: 28 cm
• Parent Bibliography ID:
  • BA0022700X