Integrated circuit metrology, inspection, and process control VII : 2-4 March 1993, San Jose, California

Author(s)

• Postek, Michael T.
• Society of Photo-optical Instrumentation Engineers
• SPIE Conference on Integrated Circuit Metrology, Inspection, and Process Control

Bibliographic Information

Integrated circuit metrology, inspection, and process control VII : 2-4 March 1993, San Jose, California

Michael T. Postek, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 1926）

SPIE, c1993

Note

Includes bibliographical references and index

Details

• NCID: BA2710434X
• ISBN:
  • 0819411604
• LCCN: 91061053
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash., USA
• Pages/Volumes: xi, 594 p.
• Size: 28 cm
• Classification:
  • LCC : TK7874
  • DC20 : 621.381/5
• Subject Headings:
  • LCSH : Integrated circuits -- Inspection -- Congresses
  • LCSH : Integrated circuits -- Measurement -- Congresses
• Parent Bibliography ID:
  • BA0022700X