Optical/laser microlithography : 3-5 March 1993, San Jose, California

著者

• Cuthbert, John D.
• Society of Photo-optical Instrumentation Engineers

書誌事項

Optical/laser microlithography : 3-5 March 1993, San Jose, California

John D. Cuthbert Chair/editor ; sponsored by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 1927）

SPIE, c1993

• pt. 1
• pt. 2

注記

Includes bibliographies and index

詳細情報

• NII書誌ID(NCID): BA27107315
• ISBN:
  • 0819411612
• LCCN: 93084068
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash., USA
• ページ数/冊数: 2 v.
• 大きさ: 28 cm
• 親書誌ID:
  • BA0022700X