Optical/laser microlithography : 3-5 March 1993, San Jose, California

Author(s)

• Cuthbert, John D.
• Society of Photo-optical Instrumentation Engineers

Bibliographic Information

Optical/laser microlithography : 3-5 March 1993, San Jose, California

John D. Cuthbert, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 1927）

SPIE, c1993

• pt. 1
• pt. 2

Note

Includes bibliographical references and index

Details

• NCID: BA27107326
• ISBN:
  • 0819411612
  • 0819411612
• LCCN: 93084068
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash., USA
• Pages/Volumes: 2 v. (x, 933 p.)
• Size: 28 cm
• Classification:
  • LCC : TA1677
  • DC20 : 621.36/6
• Subject Headings:
  • LCSH : Lasers -- Industrial applications -- Congresses
  • LCSH : Optical instruments -- Congresses
  • LCSH : Microlithography -- Congresses
• Parent Bibliography ID:
  • BA0022700X