Diffractometry and scatterometry : 24-28 May 1993, Warsaw, Poland

Author(s)

• Pluta, Maksymilian
• Szyjer, Mariusz
• Society of Photo-optical Instrumentation Engineers. Poland Chapter

Bibliographic Information

Diffractometry and scatterometry : 24-28 May 1993, Warsaw, Poland

Maksymilian Pluta, Mariusz Szyjer, chairs/editors ; organized by SPIE Poland Chapter, Institute of Applied Optics, Warsaw ; sponsored by SPIE--the International Society for Optical Engineering, State Committee for Scientific Research (Poland)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 1991）（SPIE Poland Chapter proceedings, 12）

SPIE, c1994

Note

Includes bibliographical references and index

Details

• NCID: BA27177004
• ISBN:
  • 0819412406
• LCCN: 94069222
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash., USA
• Pages/Volumes: xvi, 268 p.
• Size: 28 cm
• Classification:
  • LCC : QC414.8
  • DC20 : 535/.4
• Subject Headings:
  • LCSH : Diffraction -- Congresses
  • LCSH : Optical instruments -- Design and construction -- Congresses
• Parent Bibliography ID:
  • BA0022700X
  • BA26782753