Diffractometry and scatterometry : 24-28 May 1993, Warsaw, Poland

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Diffractometry and scatterometry : 24-28 May 1993, Warsaw, Poland

Maksymilian Pluta, Mariusz Szyjer, chairs/editors ; organized by SPIE Poland Chapter, Institute of Applied Optics, Warsaw ; sponsored by SPIE--the International Society for Optical Engineering, State Committee for Scientific Research (Poland)

(Proceedings / SPIE -- the International Society for Optical Engineering, v. 1991)(SPIE Poland Chapter proceedings, 12)

SPIE, c1994

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Includes bibliographical references and index

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