Circuit, device, and process simulation : mathematical and numerical aspects
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Bibliographic Information
Circuit, device, and process simulation : mathematical and numerical aspects
Wiley, 1996
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Includes bibliographical references and index
Description and Table of Contents
Description
This book presents for the first time a unified treatment of the physical processes, mathematical models and numerical techniques for circuit, device and process simulation. At the macroscopic level linear and nonlinear circuit elements are introduced to yield a mathematical model of an integrated circuit. Numerical techniques used to solve this coupled system of ODEs are described. Microscopically, current flow within a transistor is modeled using the drift-diffusion and hydrodynamic PDE systems. Finite difference and finite element methods for spatial discretizations are treated, as are grid generation and refinement, upwinding, and multilevel schemes. At the fabrication level, physical processes such as diffusion, oxidation, and crystal growth are modeled using reaction-diffusion-convection equations. These models require multistep integration techniques and Krylov projection methods for successful implementation. Exercises, programming assignments, and an extensive bibliography are included to reinforce and extend the treatment.
Table of Contents
Partial table of contents: Modeling and Simulation. The Circuit Equations. Transistors and Semiconductor Circuits. Numerical Integration of Circuit ODEs. Ion Implantation. Single Species Diffusion. Multiple Species Diffusion. Integrating Reaction-Diffusion Systems. Technology Computer Aided Design. Bibliography. Index.
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