Handbook of compound semiconductors : growth, processing, characterization, and devices
著者
書誌事項
Handbook of compound semiconductors : growth, processing, characterization, and devices
（Materials science and process technology series）
Noyes Publications, c1995
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注記
Includes bibliographical references and index
内容説明・目次
内容説明
This book reviews the recent advances and current technologies used to produce microelectronic and optoelectronic devices from compound semiconductors. It provides a complete overview of the technologies necessary to grow bulk single-crystal substrates, grow hetero-or homoepitaxial films, and process advanced devices such as HBT's, QW diode lasers, etc.
目次
Bulk Crystal GrowthMOCVD of Compound Semiconductor LayersMolecular Beam EpitaxyPhysical and Chemical Deposition of Metals as Ohmic Contacts to InP and Related MaterialsSurface Processing of III-V SemiconductorsIon Implantation Induced Extended Defects in GaAsPassivation of GaAs and InPWet and Dry Etching of Compound SemiconductorsRapid Isothermal Processing (RIP)Epitaxial Lift-Off for Thin Film Compound Semiconductor DevicesPackagingChemical, Structural and Electronic Characterization of Compound Semiconductor Surfaces and Interfaces by X-ray Photoelectron Spectroscopy and Diffraction TechniquesCharacterization of Compound Semiconductor Material by Ion BeamsOptical Characterization of Compound SemiconductorsGallium Arsenide Microelectronic Devices and CircuitsOptoelectronic DevicesAcknowledgmentsReferencesIndex
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