ALTECH 95 : analytical techniques for semiconductor materials and process characterization II : proceedings of the Satellite Symposium to ESSDERC 95, The Hague, The Netherlands

Author(s)

• Satellite Symposium to ESSDERC '95
• Kolbesen, Bernd O.
• Claeys, Cor L.
• Stallhofer, Peter
• Electrochemical Society. Electronics Division
• European Solid State Device Research Conference

Bibliographic Information

ALTECH 95 : analytical techniques for semiconductor materials and process characterization II : proceedings of the Satellite Symposium to ESSDERC 95, The Hague, The Netherlands

edited by Bernd O. Kolbesen, Cor Claeys, Peter Stallhofer ; [sponsored by] Electronics Division

（Proceedings / [Electrochemical Society], v. 95-30）

Electrochemical Society, c1995

Other Title

Analytical techniques for semiconductor materials and process characterization II

Note

ALTECH 95 was held Sept. 28-29, 1995 in The Hague, Netherlands in conjunction with ESSDERC 95, the 25th European Solid State Device Research Conference, held Sept. 24-27, 1995

Includes bibliographical references and indexes

Details

• NCID: BA27796684
• ISBN:
  • 1566771226
• LCCN: 96061603
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Pennington, NJ
• Pages/Volumes: ix, 366 p.
• Size: 23 cm
• Classification:
  • LCC : QD139.S44
• Subject Headings:
  • LCSH : Semiconductors -- Analysis -- Congresses
• Parent Bibliography ID:
  • BA01323290