High density plasma sources : design, physics and performance

Author(s)

• Popov, Oleg A.

Bibliographic Information

High density plasma sources : design, physics and performance

edited by Oleg A. Popov

（Materials science and process technology series）

Noyes Publications, c1995

Note

Includes bibliographical references and index

Details

• NCID: BA27808127
• ISBN:
  • 0815513771
• LCCN: 95004918
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Park Ridge, NJ
• Pages/Volumes: xx, 445 p.
• Size: 25 cm
• Classification:
  • LCC : QC718.5.D4
  • DC20 : 621.044
• Subject Headings:
  • LCSH : Plasma density
  • LCSH : Plasma generators
  • LCSH : High temperature plasmas
• Parent Bibliography ID:
  • BA04523161