Proceedings of the 36th International Symposium on Electron, Ion, and Photon Beams, 26-29 May 1992 The Peaboy Hotel, Orland, Glorida

著者

• International Symposium on Electron, Ion, and Photon Beams
• Kubena, Randy
• American Vacuum Society

書誌事項

Proceedings of the 36th International Symposium on Electron, Ion, and Photon Beams, 26-29 May 1992 The Peaboy Hotel, Orland, Glorida

special editor for the proceedings, Randy Kubena

（Journal of vacuum science & technology, B . vol. 10, no. 6）

Published for the American Vacuum Society by the American Institute of Physics, 1992

注記

Includes index

詳細情報

• NII書誌ID(NCID): BA27918442
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: New York
• ページ数/冊数: p. 2509-3260
• 大きさ: 30 cm
• 分類:
  • LCC : TR940
  • DC19 : 686.2/325
• 件名:
  • LCSH : Photolithography -- Congresses
  • LCSH : Lithography, Electron beam -- Congresses
  • LCSH : Ion beam lithography -- Congresses
  • LCSH : X-ray lithography -- Congresses
  • LCSH : Photoresists -- Congresses
• 親書誌ID:
  • BA07799828