Proceedings of the 36th International Symposium on Electron, Ion, and Photon Beams, 26-29 May 1992 The Peaboy Hotel, Orland, Glorida

Author(s)

• International Symposium on Electron, Ion, and Photon Beams
• Kubena, Randy
• American Vacuum Society

Bibliographic Information

Proceedings of the 36th International Symposium on Electron, Ion, and Photon Beams, 26-29 May 1992 The Peaboy Hotel, Orland, Glorida

special editor for the proceedings, Randy Kubena

（Journal of vacuum science & technology, B . vol. 10, no. 6）

Published for the American Vacuum Society by the American Institute of Physics, 1992

Note

Includes index

Details

• NCID: BA27918442
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: New York
• Pages/Volumes: p. 2509-3260
• Size: 30 cm
• Classification:
  • LCC : TR940
  • DC19 : 686.2/325
• Subject Headings:
  • LCSH : Photolithography -- Congresses
  • LCSH : Lithography, Electron beam -- Congresses
  • LCSH : Ion beam lithography -- Congresses
  • LCSH : X-ray lithography -- Congresses
  • LCSH : Photoresists -- Congresses
• Parent Bibliography ID:
  • BA07799828