IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : ASMC 95 proceedings, November 13-15, 1995, Cambridge, Massachusetts
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書誌事項
IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : ASMC 95 proceedings, November 13-15, 1995, Cambridge, Massachusetts
Additional copies of these proceedings may be purchased from: SEMI, c1995
- : soft.
- : case.
- : micro.
- タイトル別名
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95CB35811
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注記
Includes bibliographical references
"IEEE catalog number 95CH35811" -- T.p. verso
"Theme - Semiconductor Manufacturing: Economic Solutions for the 21st Century" -- T.p.
