Integrating reliability into microelectronics manufacturing
著者
書誌事項
Integrating reliability into microelectronics manufacturing
（Design and measurement in electronic engineering）
Wiley, c1994
- : pbk
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注記
Includes bibliographical references and index
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内容説明・目次
内容説明
With the increased emphasis upon quality and reliability, there is now a requirement for minimal defects in modern electronic components. The field of microelectronics has developed to meet this need. It is now possible, through the selection of materials, processing techniques and technologies, to design reliability into the semiconductor during manufacturing. Explaining and examining the principles, processes and materials of reliability manufacturing, this book establishes a methodology for meeting the technological challenges of VLSI.
目次
- Microelectronics Industry and Manufacturing
- Dual Use Microelectronics: A Reliability Approach
- Manufacturing of Microcircuits
- Crystal Growth and Substrate Damage Mechanism
- Dielectrics in the Manufacture of Microcircuits
- Reliable Active Layer Doping by Diffusion and Ion Implantation
- Lithography and Failure Mechanisms
- Metallizations for Devices and Circuits
- Device Packaging and Characterization
- Manufacturing of Plastic Integrated Circuits
- Manufacturing of Micromechanical Systems and Computer Control of Micromachining
- Manufacturing of Electronic Packages by Industrial Robots
- Manufacture of Microwave Monolithic Integrated Circuits.
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