Semiconductor characterization : present status and future needs

著者

• Bullis, W. Murray
• Seiler, David G.
• Diebold, A. C. (Alain C.)

書誌事項

Semiconductor characterization : present status and future needs

editors, W.M. Bullis, D.G. Seiler, A.C. Diebold

American Institute of Physics, 1996

注記

Includes index

内容説明・目次

内容説明

This book serves as a baseline reference for the characterization of semiconductors for the next decade. It includes sections devoted to characterization for silicon IC development and manufacturing and for III-V compound semiconductor materials, devices, and manufacturing. This book acts as a reference or sourcebook for industry, government and academia who are interested in the reviews and state-of-the-art knowledge presented on semiconductor issues pertaining to the subject of semiconductor characterization for semiconductor research, development, and manufacturing.

目次

Contents: 1. Drivers for Silicon Process Development and Manufacturing. 2. Metrology Requirements for Beyond 0.35-um Geometries 3. Silicon Wafers, Gate Dielectrics, and Process Simulation. 4. Interconnects and Failure Analysis. 5. Critical Analytical Methods. 6. In-Situ, Real Time Diagnosis, Analysis, and Control. 7. Frontiers in Compound Semiconductors.

「Nielsen BookData」 より

• NII書誌ID(NCID): BA28029104
• ISBN:
  • 1563965038
• LCCN: 95041074
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Woodbury, NY
• ページ数/冊数: xix, 729 p.
• 大きさ: 29 cm
• 分類:
  • LCC : TK7871.85
  • DC20 : 621.3815/2
• 件名:
  • LCSH : Semiconductors -- Characterization -- Congresses
  • LCSH : Semiconductors -- Design and construction -- Congresses