Semiconductor characterization : present status and future needs
Author(s)
Bibliographic Information
Semiconductor characterization : present status and future needs
American Institute of Physics, 1996
Available at / 16 libraries
-
No Libraries matched.
- Remove all filters.
Note
Includes index
Description and Table of Contents
Description
This book serves as a baseline reference for the characterization of semiconductors for the next decade. It includes sections devoted to characterization for silicon IC development and manufacturing and for III-V compound semiconductor materials, devices, and manufacturing. This book acts as a reference or sourcebook for industry, government and academia who are interested in the reviews and state-of-the-art knowledge presented on semiconductor issues pertaining to the subject of semiconductor characterization for semiconductor research, development, and manufacturing.
Table of Contents
Contents: 1. Drivers for Silicon Process Development and Manufacturing. 2. Metrology Requirements for Beyond 0.35-um Geometries 3. Silicon Wafers, Gate Dielectrics, and Process Simulation. 4. Interconnects and Failure Analysis. 5. Critical Analytical Methods. 6. In-Situ, Real Time Diagnosis, Analysis, and Control. 7. Frontiers in Compound Semiconductors.
by "Nielsen BookData"
