Optical characterization techniques for high-performance microelectronic device manufacturing : 20 October 1994, Austin, Texas

著者

    • Mathur, Jagdish P.
    • Lowell, John
    • Chen, Ray T.
    • Society of Photo-optical Instrumentation Engineers

書誌事項

Optical characterization techniques for high-performance microelectronic device manufacturing : 20 October 1994, Austin, Texas

Jagdish P. Mathur, John Lowell, Ray T. Chen, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 2337）

SPIE, c1994

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注記

Includes bibliographical references and author index

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  • Proceedings

    SPIE -- the International Society for Optical Engineering

    SPIE -- the International Society for Optical Engineering

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