Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing

著者

• Novak, Richard E.
• Rużyłło, Jerzy
• Electrochemical Society. Electronics Division

書誌事項

Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing

editors, Richard E. Novak, Jerzy Ruzyllo ; [sponsored by the Electrochemical Society] Electronics Divisions

（Proceedings / [Electrochemical Society], v. 95-20）

The Electrochemical Society, c1996

注記

Includes bibliographies and index

"held during the Fall Electrochemical Society meeting in Chicago, Illinois, October 1995"

• NII書誌ID(NCID): BA28544359
• ISBN:
  • 1566771153
• LCCN: 95061593
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, NJ
• ページ数/冊数: xii, 626 p.
• 大きさ: 23 cm
• 親書誌ID:
  • BA01323290