Proceedings of the Thirteenth International Symposium on Chemical Vapor Deposition

著者

• International Symposium on Chemical Vapor Deposition
• Electrochemical Society. High Temperature Materials Division
• Electrochemical Society. Dielectric Science and Technology Division
• Electrochemical Society. Electronics Division
• American Ceramic Society
• Materials Research Society
• Besmann, T. M.

書誌事項

Proceedings of the Thirteenth International Symposium on Chemical Vapor Deposition

editors, T. M. Besmann ... [et al.]

（Proceedings / [Electrochemical Society], v. 96-5）

Electrochemical Society, c1996

タイトル別名

CVD XIII

注記

"High Temperature Materials, Dielectric Science and Technology and Electronics Divisions, the American Ceramic Society, and the Materials Research Society"

held in Los Angeles, California, May 5-10, 1996

詳細情報

• NII書誌ID(NCID): BA28548575
• ISBN:
  • 1566771552
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, NJ
• ページ数/冊数: xxii, 892 p.
• 大きさ: 23 cm
• 親書誌ID:
  • BA01323290