Simulation and design of microsystems and microstructures

著者

• International Conference on Simulation and Design of Microsystems and Microstructures
• Adey, R. A.
• Lahrmann, A.
• Lessmöllmann, C.

書誌事項

Simulation and design of microsystems and microstructures

editors, R.A. Adey, A. Lahrmann, C. Lessmölmann

Computational Mechanics, c1995

• : uk
• : us

注記

"First International Conference on Simulation and Design of Microsystems and Microstructures, MicroSIM 95" -- half t.p.

Conference held in Southampton, UK, Sept. 1995

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BA2856048X
• ISBN:
  • 1853123900
  • 1562523147
• LCCN: 95068882
• 出版国コード: uk
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Southampton
• ページ数/冊数: 337 p.
• 大きさ: 24 cm
• 分類:
  • LCC : TK7874
• 件名:
  • LCSH : Microelectronics -- Design -- Congresses
  • LCSH : Microelectronics -- Simulation methods -- Congresses
  • LCSH : Masks (Electonics) -- Congresses
  • LCSH : Micromechanics -- Congresses
  • LCSH : Computer-aided design -- Congresses