Microelectronics manufacturability, yield, and reliability : 20-21 October 1994, Austin, Texas

著者

• Vasquez, Barbara
• Kawasaki, Hisao
• Society of Photo-optical Instrumentation Engineers

書誌事項

Microelectronics manufacturability, yield, and reliability : 20-21 October 1994, Austin, Texas

Barbara Vasquez, Hisao Kawasaki, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 2334）

SPIE, c1994

注記

Includes bibliographical references and index

• NII書誌ID(NCID): BA29176079
• ISBN:
  • 0819416673
• LCCN: 94067260
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash., USA
• ページ数/冊数: ix, 348 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7874
• 件名:
  • LCSH : Integrated circuits -- Design and construction -- Congresses
  • LCSH : Integrated circuits -- Reliability -- Congresses
• 親書誌ID:
  • BA0022700X